Generación de modelos reducidos para micro-actuadores electrostáticos

Abstract

The computational cost and complexity level of multiphysics analysis used in microsystems have demanded the creation of methodologies to create simplified models that provide accurate results in a fast and efficient way. These simplifications are known as the reduced order model (ROM) extraction. The ROM model captures lineal and nolineal behaviors accurately, in addition such a model is generated in a form that can be integrated into system level simulators. This paper introduces perhaps the most famous method to generate ROM models at the present. The method is applied to the analysis of a micro clamped-clamped beam electrostatically actuated, for this structure different simulations are performed; these analyses characterize the deflection of the structure for different kinds of voltage excitations. The outcomes demonstrate that sophisticated analysis can be carried out almost immediately once the ROM model is created.