Designing and simulating a nitinol-based micro ejector

Abstract

This paper describes pico-droplet ejector design and simulation. The actuation system was based on two interconnected nitinol membranes' shape memory effect. Ejected volume was 12pL and it operated at 30°C to 64°C. Ejecting excitation voltage was 12V and the ejecting energy required by actuator operation was 26µJ per drop. These pico-liter ejectors could have applications in making, lubricating and cooling integrated circuits.