3D Simulation of the Coil Geometry Effect on the Induction Heating Process in Czochralski Crystal Growth System

Abstract

Abstract Herein, influence of coil geometry in a Czochralski crystal growth system is studied using 3D finite element method. Three different geometries for the helical RF‐coil including solenoid, conical solenoid, and rectangular are considered and distribution of magnetic flux density (through the system), produced heat in the RF‐coil and the graphite crucible, as well as heat volume integral are calculated. The obtained numerical results show that every considered coil produces a special heating structure due to its shape with some advantages and disadvantages.